5/20/2012	12:37:38 AM	Recipe started at 12:37 AM
5/20/2012	12:37:38 AM	Helium valve closed
5/20/2012	12:37:38 AM	H2 valve closed
5/20/2012	12:37:38 AM	BCl3 valve closed
5/20/2012	12:37:38 AM	PH3 valve closed
5/20/2012	12:37:38 AM	SiCl4 pre valve closed
5/20/2012	12:37:38 AM	SiCl4 post valve closed
5/20/2012	12:37:38 AM	Main Vac valve closed
5/20/2012	12:37:38 AM	Bypass valve closed
5/20/2012	12:37:38 AM	Bubbler valve closed
5/20/2012	12:37:38 AM	Helium MFC set to  0.000000
5/20/2012	12:37:38 AM	H2 MFC set to  0.000000
5/20/2012	12:37:38 AM	BCl3 MFC set to  0.000000
5/20/2012	12:37:38 AM	PH3 MFC set to  0.000000
5/20/2012	12:37:38 AM	SiCl4 MFC set to  0.000000
5/20/2012	12:37:38 AM	Bypass solenoid MFC set to  0.000000
5/20/2012	12:37:38 AM	Tube furnace set to 0
5/20/2012	12:37:41 AM	Helium valve closed
5/20/2012	12:37:41 AM	BCl3 valve closed
5/20/2012	12:37:41 AM	PH3 valve closed
5/20/2012	12:37:41 AM	SiCl4 pre valve closed
5/20/2012	12:37:41 AM	SiCl4 post valve closed
5/20/2012	12:37:41 AM	Main Vac valve closed
5/20/2012	12:37:41 AM	Bypass valve closed
5/20/2012	12:37:41 AM	Bubbler valve closed
5/20/2012	12:37:41 AM	H2 valve opened
5/20/2012	12:37:41 AM	Helium MFC set to  0.000000
5/20/2012	12:37:41 AM	H2 MFC set to  500.000000
5/20/2012	12:37:41 AM	BCl3 MFC set to  0.000000
5/20/2012	12:37:41 AM	PH3 MFC set to  0.000000
5/20/2012	12:37:41 AM	SiCl4 MFC set to  0.000000
5/20/2012	12:37:41 AM	Bypass solenoid MFC set to  0.000000
5/20/2012	12:37:41 AM	Tube furnace set to 0
5/20/2012	12:38:57 AM	Helium valve closed
5/20/2012	12:38:57 AM	BCl3 valve closed
5/20/2012	12:38:57 AM	PH3 valve closed
5/20/2012	12:38:57 AM	SiCl4 pre valve closed
5/20/2012	12:38:57 AM	SiCl4 post valve closed
5/20/2012	12:38:57 AM	Main Vac valve closed
5/20/2012	12:38:57 AM	Bypass valve closed
5/20/2012	12:38:57 AM	H2 valve opened
5/20/2012	12:38:57 AM	Bubbler valve opened
5/20/2012	12:38:57 AM	Helium MFC set to  0.000000
5/20/2012	12:38:57 AM	H2 MFC set to  500.000000
5/20/2012	12:38:57 AM	BCl3 MFC set to  0.000000
5/20/2012	12:38:57 AM	PH3 MFC set to  0.000000
5/20/2012	12:38:57 AM	SiCl4 MFC set to  0.000000
5/20/2012	12:38:57 AM	Bypass solenoid MFC set to  0.000000
5/20/2012	12:38:58 AM	Tube furnace set to 0
5/20/2012	12:38:59 AM	Helium valve closed
5/20/2012	12:38:59 AM	BCl3 valve closed
5/20/2012	12:38:59 AM	PH3 valve closed
5/20/2012	12:38:59 AM	SiCl4 pre valve closed
5/20/2012	12:38:59 AM	SiCl4 post valve closed
5/20/2012	12:38:59 AM	Main Vac valve closed
5/20/2012	12:38:59 AM	Bypass valve closed
5/20/2012	12:38:59 AM	H2 valve opened
5/20/2012	12:38:59 AM	Bubbler valve opened
5/20/2012	12:38:59 AM	Helium MFC set to  0.000000
5/20/2012	12:38:59 AM	H2 MFC set to  500.000000
5/20/2012	12:38:59 AM	BCl3 MFC set to  0.000000
5/20/2012	12:38:59 AM	PH3 MFC set to  0.000000
5/20/2012	12:38:59 AM	SiCl4 MFC set to  0.000000
5/20/2012	12:38:59 AM	Bypass solenoid MFC set to  0.000000
5/20/2012	12:38:59 AM	Tube furnace set to 1000
5/20/2012	1:03:59 AM	Helium valve closed
5/20/2012	1:03:59 AM	BCl3 valve closed
5/20/2012	1:03:59 AM	PH3 valve closed
5/20/2012	1:03:59 AM	Main Vac valve closed
5/20/2012	1:03:59 AM	Bypass valve closed
5/20/2012	1:03:59 AM	H2 valve opened
5/20/2012	1:03:59 AM	SiCl4 pre valve opened
5/20/2012	1:03:59 AM	SiCl4 post valve opened
5/20/2012	1:03:59 AM	Bubbler valve opened
5/20/2012	1:03:59 AM	Helium MFC set to  0.000000
5/20/2012	1:03:59 AM	H2 MFC set to  500.000000
5/20/2012	1:03:59 AM	BCl3 MFC set to  0.000000
5/20/2012	1:03:59 AM	PH3 MFC set to  0.000000
5/20/2012	1:03:59 AM	SiCl4 MFC set to  50.000000
5/20/2012	1:03:59 AM	Bypass solenoid MFC set to  0.000000
5/20/2012	1:03:59 AM	Tube furnace set to 1000
5/20/2012	1:11:59 AM	Helium valve closed
5/20/2012	1:11:59 AM	BCl3 valve closed
5/20/2012	1:11:59 AM	PH3 valve closed
5/20/2012	1:11:59 AM	SiCl4 pre valve closed
5/20/2012	1:11:59 AM	SiCl4 post valve closed
5/20/2012	1:11:59 AM	Main Vac valve closed
5/20/2012	1:11:59 AM	Bypass valve closed
5/20/2012	1:11:59 AM	H2 valve opened
5/20/2012	1:11:59 AM	Bubbler valve opened
5/20/2012	1:11:59 AM	Helium MFC set to  0.000000
5/20/2012	1:11:59 AM	H2 MFC set to  500.000000
5/20/2012	1:11:59 AM	BCl3 MFC set to  0.000000
5/20/2012	1:11:59 AM	PH3 MFC set to  0.000000
5/20/2012	1:11:59 AM	SiCl4 MFC set to  0.000000
5/20/2012	1:11:59 AM	Bypass solenoid MFC set to  0.000000
5/20/2012	1:11:59 AM	Tube furnace set to 750
5/20/2012	1:26:10 AM	Helium valve closed
5/20/2012	1:26:10 AM	BCl3 valve closed
5/20/2012	1:26:10 AM	PH3 valve closed
5/20/2012	1:26:10 AM	SiCl4 pre valve closed
5/20/2012	1:26:10 AM	SiCl4 post valve closed
5/20/2012	1:26:10 AM	Main Vac valve closed
5/20/2012	1:26:10 AM	Bypass valve closed
5/20/2012	1:26:10 AM	H2 valve opened
5/20/2012	1:26:10 AM	Bubbler valve opened
5/20/2012	1:26:10 AM	Helium MFC set to  0.000000
5/20/2012	1:26:10 AM	H2 MFC set to  500.000000
5/20/2012	1:26:10 AM	BCl3 MFC set to  0.000000
5/20/2012	1:26:10 AM	PH3 MFC set to  0.000000
5/20/2012	1:26:10 AM	SiCl4 MFC set to  0.000000
5/20/2012	1:26:10 AM	Bypass solenoid MFC set to  0.000000
5/20/2012	1:26:10 AM	Tube furnace set to 0
5/20/2012	1:38:46 AM	H2 valve closed
5/20/2012	1:38:46 AM	BCl3 valve closed
5/20/2012	1:38:46 AM	PH3 valve closed
5/20/2012	1:38:46 AM	SiCl4 pre valve closed
5/20/2012	1:38:46 AM	SiCl4 post valve closed
5/20/2012	1:38:46 AM	Main Vac valve closed
5/20/2012	1:38:46 AM	Bypass valve closed
5/20/2012	1:38:46 AM	Helium valve opened
5/20/2012	1:38:46 AM	Bubbler valve opened
5/20/2012	1:38:46 AM	Helium MFC set to  500.000000
5/20/2012	1:38:46 AM	H2 MFC set to  0.000000
5/20/2012	1:38:46 AM	BCl3 MFC set to  0.000000
5/20/2012	1:38:46 AM	PH3 MFC set to  0.000000
5/20/2012	1:38:46 AM	SiCl4 MFC set to  0.000000
5/20/2012	1:38:46 AM	Bypass solenoid MFC set to  0.000000
5/20/2012	1:38:46 AM	Tube furnace set to 0
5/20/2012	1:44:38 AM	Run aborted at 1:44 AM
5/20/2012	1:44:38 AM	Helium valve closed
5/20/2012	1:44:38 AM	H2 valve closed
5/20/2012	1:44:38 AM	BCl3 valve closed
5/20/2012	1:44:38 AM	PH3 valve closed
5/20/2012	1:44:38 AM	SiCl4 pre valve closed
5/20/2012	1:44:38 AM	SiCl4 post valve closed
5/20/2012	1:44:38 AM	Bypass valve closed
5/20/2012	1:44:38 AM	Main Vac valve closed
5/20/2012	1:44:38 AM	Bubbler valve closed
5/20/2012	1:44:38 AM	Helium MFC set to  0.000000
5/20/2012	1:44:38 AM	H2 MFC set to  0.000000
5/20/2012	1:44:38 AM	BCl3 MFC set to  0.000000
5/20/2012	1:44:38 AM	PH3 MFC set to  0.000000
5/20/2012	1:44:38 AM	SiCl4 MFC set to  0.000000
5/20/2012	1:44:38 AM	Tube furnace set to 0
5/20/2012	1:46:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2012	1:46:39 AM	Recipe started at 1:46 AM
5/20/2012	1:46:39 AM	Helium valve closed
5/20/2012	1:46:39 AM	H2 valve closed
5/20/2012	1:46:39 AM	BCl3 valve closed
5/20/2012	1:46:39 AM	PH3 valve closed
5/20/2012	1:46:39 AM	SiCl4 pre valve closed
5/20/2012	1:46:39 AM	SiCl4 post valve closed
5/20/2012	1:46:39 AM	Main Vac valve closed
5/20/2012	1:46:39 AM	Bubbler valve closed
5/20/2012	1:46:39 AM	Bypass valve opened
5/20/2012	1:46:39 AM	Helium MFC set to  0.000000
5/20/2012	1:46:39 AM	H2 MFC set to  0.000000
5/20/2012	1:46:39 AM	BCl3 MFC set to  0.000000
5/20/2012	1:46:39 AM	PH3 MFC set to  0.000000
5/20/2012	1:46:39 AM	SiCl4 MFC set to  0.000000
5/20/2012	1:46:39 AM	Bypass solenoid MFC set to  0.000000
5/20/2012	1:46:39 AM	Tube furnace set to 0
5/20/2012	1:47:37 AM	Helium valve closed
5/20/2012	1:47:37 AM	H2 valve closed
5/20/2012	1:47:37 AM	BCl3 valve closed
5/20/2012	1:47:37 AM	PH3 valve closed
5/20/2012	1:47:37 AM	SiCl4 pre valve closed
5/20/2012	1:47:37 AM	SiCl4 post valve closed
5/20/2012	1:47:37 AM	Main Vac valve closed
5/20/2012	1:47:37 AM	Bubbler valve closed
5/20/2012	1:47:37 AM	Bypass valve opened
5/20/2012	1:47:37 AM	Helium MFC set to  0.000000
5/20/2012	1:47:37 AM	H2 MFC set to  0.000000
5/20/2012	1:47:37 AM	BCl3 MFC set to  0.000000
5/20/2012	1:47:37 AM	PH3 MFC set to  0.000000
5/20/2012	1:47:37 AM	SiCl4 MFC set to  0.000000
5/20/2012	1:47:37 AM	Bypass solenoid MFC set to  0.000000
5/20/2012	1:47:37 AM	Tube furnace set to 0
5/20/2012	1:47:46 AM	Helium valve closed
5/20/2012	1:47:46 AM	H2 valve closed
5/20/2012	1:47:46 AM	BCl3 valve closed
5/20/2012	1:47:46 AM	PH3 valve closed
5/20/2012	1:47:46 AM	SiCl4 pre valve closed
5/20/2012	1:47:46 AM	SiCl4 post valve closed
5/20/2012	1:47:46 AM	Bypass valve closed
5/20/2012	1:47:46 AM	Bubbler valve closed
5/20/2012	1:47:46 AM	Main Vac valve opened
5/20/2012	1:47:46 AM	Helium MFC set to  0.000000
5/20/2012	1:47:46 AM	H2 MFC set to  0.000000
5/20/2012	1:47:46 AM	BCl3 MFC set to  0.000000
5/20/2012	1:47:46 AM	PH3 MFC set to  0.000000
5/20/2012	1:47:46 AM	SiCl4 MFC set to  0.000000
5/20/2012	1:47:46 AM	Bypass solenoid MFC set to  0.000000
5/20/2012	1:47:46 AM	Tube furnace set to 0
5/20/2012	1:47:47 AM	Run finished at 1:47 AM
5/20/2012	1:47:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2012	12:40:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2012	12:40:44 PM	Recipe started at 12:40 PM
5/20/2012	12:40:44 PM	Helium valve closed
5/20/2012	12:40:44 PM	H2 valve closed
5/20/2012	12:40:44 PM	BCl3 valve closed
5/20/2012	12:40:44 PM	PH3 valve closed
5/20/2012	12:40:44 PM	SiCl4 pre valve closed
5/20/2012	12:40:44 PM	SiCl4 post valve closed
5/20/2012	12:40:44 PM	Main Vac valve closed
5/20/2012	12:40:44 PM	Bypass valve closed
5/20/2012	12:40:44 PM	Bubbler valve closed
5/20/2012	12:40:44 PM	Helium MFC set to  0.000000
5/20/2012	12:40:44 PM	H2 MFC set to  0.000000
5/20/2012	12:40:44 PM	BCl3 MFC set to  0.000000
5/20/2012	12:40:44 PM	PH3 MFC set to  0.000000
5/20/2012	12:40:44 PM	SiCl4 MFC set to  0.000000
5/20/2012	12:40:45 PM	Bypass solenoid MFC set to  0.000000
5/20/2012	12:40:45 PM	Tube furnace set to 0
5/20/2012	12:40:48 PM	H2 valve closed
5/20/2012	12:40:48 PM	BCl3 valve closed
5/20/2012	12:40:48 PM	PH3 valve closed
5/20/2012	12:40:48 PM	SiCl4 pre valve closed
5/20/2012	12:40:48 PM	SiCl4 post valve closed
5/20/2012	12:40:48 PM	Main Vac valve closed
5/20/2012	12:40:48 PM	Bypass valve closed
5/20/2012	12:40:48 PM	Bubbler valve closed
5/20/2012	12:40:48 PM	Helium valve opened
5/20/2012	12:40:48 PM	Helium MFC set to  500.000000
5/20/2012	12:40:48 PM	H2 MFC set to  0.000000
5/20/2012	12:40:48 PM	BCl3 MFC set to  0.000000
5/20/2012	12:40:48 PM	PH3 MFC set to  0.000000
5/20/2012	12:40:48 PM	SiCl4 MFC set to  0.000000
5/20/2012	12:40:48 PM	Bypass solenoid MFC set to  0.000000
5/20/2012	12:40:48 PM	Tube furnace set to 0
5/20/2012	12:42:00 PM	Helium valve closed
5/20/2012	12:42:00 PM	H2 valve closed
5/20/2012	12:42:00 PM	BCl3 valve closed
5/20/2012	12:42:00 PM	PH3 valve closed
5/20/2012	12:42:00 PM	SiCl4 pre valve closed
5/20/2012	12:42:00 PM	SiCl4 post valve closed
5/20/2012	12:42:00 PM	Main Vac valve closed
5/20/2012	12:42:00 PM	Bypass valve closed
5/20/2012	12:42:00 PM	Bubbler valve closed
5/20/2012	12:42:00 PM	Helium MFC set to  0.000000
5/20/2012	12:42:00 PM	H2 MFC set to  0.000000
5/20/2012	12:42:00 PM	BCl3 MFC set to  0.000000
5/20/2012	12:42:00 PM	PH3 MFC set to  0.000000
5/20/2012	12:42:00 PM	SiCl4 MFC set to  0.000000
5/20/2012	12:42:00 PM	Bypass solenoid MFC set to  0.000000
5/20/2012	12:42:01 PM	Tube furnace set to 0
5/20/2012	12:42:02 PM	Run finished at 12:42 PM
5/20/2012	12:42:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/20/2012	12:43:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2012	12:43:42 PM	Recipe started at 12:43 PM
5/20/2012	12:43:42 PM	Helium valve closed
5/20/2012	12:43:42 PM	H2 valve closed
5/20/2012	12:43:42 PM	BCl3 valve closed
5/20/2012	12:43:42 PM	PH3 valve closed
5/20/2012	12:43:42 PM	SiCl4 pre valve closed
5/20/2012	12:43:42 PM	SiCl4 post valve closed
5/20/2012	12:43:42 PM	Main Vac valve closed
5/20/2012	12:43:42 PM	Bubbler valve closed
5/20/2012	12:43:42 PM	Bypass valve opened
5/20/2012	12:43:42 PM	Helium MFC set to  0.000000
5/20/2012	12:43:42 PM	H2 MFC set to  0.000000
5/20/2012	12:43:42 PM	BCl3 MFC set to  0.000000
5/20/2012	12:43:42 PM	PH3 MFC set to  0.000000
5/20/2012	12:43:42 PM	SiCl4 MFC set to  0.000000
5/20/2012	12:43:42 PM	Bypass solenoid MFC set to  0.000000
5/20/2012	12:43:42 PM	Tube furnace set to 0
5/20/2012	12:44:47 PM	Helium valve closed
5/20/2012	12:44:47 PM	H2 valve closed
5/20/2012	12:44:47 PM	BCl3 valve closed
5/20/2012	12:44:47 PM	PH3 valve closed
5/20/2012	12:44:47 PM	SiCl4 pre valve closed
5/20/2012	12:44:47 PM	SiCl4 post valve closed
5/20/2012	12:44:47 PM	Main Vac valve closed
5/20/2012	12:44:47 PM	Bubbler valve closed
5/20/2012	12:44:47 PM	Bypass valve opened
5/20/2012	12:44:47 PM	Helium MFC set to  0.000000
5/20/2012	12:44:47 PM	H2 MFC set to  0.000000
5/20/2012	12:44:47 PM	BCl3 MFC set to  0.000000
5/20/2012	12:44:47 PM	PH3 MFC set to  0.000000
5/20/2012	12:44:47 PM	SiCl4 MFC set to  0.000000
5/20/2012	12:44:47 PM	Bypass solenoid MFC set to  0.000000
5/20/2012	12:44:47 PM	Tube furnace set to 0
5/20/2012	12:45:47 PM	Helium valve closed
5/20/2012	12:45:47 PM	H2 valve closed
5/20/2012	12:45:47 PM	BCl3 valve closed
5/20/2012	12:45:47 PM	PH3 valve closed
5/20/2012	12:45:47 PM	SiCl4 pre valve closed
5/20/2012	12:45:47 PM	SiCl4 post valve closed
5/20/2012	12:45:47 PM	Bypass valve closed
5/20/2012	12:45:47 PM	Bubbler valve closed
5/20/2012	12:45:47 PM	Main Vac valve opened
5/20/2012	12:45:47 PM	Helium MFC set to  0.000000
5/20/2012	12:45:47 PM	H2 MFC set to  0.000000
5/20/2012	12:45:47 PM	BCl3 MFC set to  0.000000
5/20/2012	12:45:47 PM	PH3 MFC set to  0.000000
5/20/2012	12:45:47 PM	SiCl4 MFC set to  0.000000
5/20/2012	12:45:47 PM	Bypass solenoid MFC set to  0.000000
5/20/2012	12:45:47 PM	Tube furnace set to 0
5/20/2012	12:45:48 PM	Run finished at 12:45 PM
5/20/2012	12:45:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2012	4:29:31 PM	Recipe started at 4:29 PM
5/20/2012	4:29:31 PM	Helium valve closed
5/20/2012	4:29:31 PM	H2 valve closed
5/20/2012	4:29:31 PM	BCl3 valve closed
5/20/2012	4:29:31 PM	PH3 valve closed
5/20/2012	4:29:31 PM	SiCl4 pre valve closed
5/20/2012	4:29:31 PM	SiCl4 post valve closed
5/20/2012	4:29:31 PM	Main Vac valve closed
5/20/2012	4:29:31 PM	Bypass valve closed
5/20/2012	4:29:31 PM	Bubbler valve closed
5/20/2012	4:29:31 PM	Helium MFC set to  0.000000
5/20/2012	4:29:31 PM	H2 MFC set to  0.000000
5/20/2012	4:29:31 PM	BCl3 MFC set to  0.000000
5/20/2012	4:29:31 PM	PH3 MFC set to  0.000000
5/20/2012	4:29:31 PM	SiCl4 MFC set to  0.000000
5/20/2012	4:29:31 PM	Bypass solenoid MFC set to  0.000000
5/20/2012	4:29:31 PM	Tube furnace set to 0
5/20/2012	4:29:34 PM	Helium valve closed
5/20/2012	4:29:34 PM	BCl3 valve closed
5/20/2012	4:29:34 PM	PH3 valve closed
5/20/2012	4:29:34 PM	SiCl4 pre valve closed
5/20/2012	4:29:34 PM	SiCl4 post valve closed
5/20/2012	4:29:34 PM	Main Vac valve closed
5/20/2012	4:29:34 PM	Bypass valve closed
5/20/2012	4:29:34 PM	Bubbler valve closed
5/20/2012	4:29:34 PM	H2 valve opened
5/20/2012	4:29:34 PM	Helium MFC set to  0.000000
5/20/2012	4:29:34 PM	H2 MFC set to  500.000000
5/20/2012	4:29:34 PM	BCl3 MFC set to  0.000000
5/20/2012	4:29:34 PM	PH3 MFC set to  0.000000
5/20/2012	4:29:34 PM	SiCl4 MFC set to  0.000000
5/20/2012	4:29:34 PM	Bypass solenoid MFC set to  0.000000
5/20/2012	4:29:34 PM	Tube furnace set to 0
5/20/2012	4:30:50 PM	Helium valve closed
5/20/2012	4:30:50 PM	BCl3 valve closed
5/20/2012	4:30:50 PM	PH3 valve closed
5/20/2012	4:30:50 PM	SiCl4 pre valve closed
5/20/2012	4:30:50 PM	SiCl4 post valve closed
5/20/2012	4:30:50 PM	Main Vac valve closed
5/20/2012	4:30:50 PM	Bypass valve closed
5/20/2012	4:30:50 PM	H2 valve opened
5/20/2012	4:30:50 PM	Bubbler valve opened
5/20/2012	4:30:50 PM	Helium MFC set to  0.000000
5/20/2012	4:30:50 PM	H2 MFC set to  500.000000
5/20/2012	4:30:50 PM	BCl3 MFC set to  0.000000
5/20/2012	4:30:50 PM	PH3 MFC set to  0.000000
5/20/2012	4:30:50 PM	SiCl4 MFC set to  0.000000
5/20/2012	4:30:50 PM	Bypass solenoid MFC set to  0.000000
5/20/2012	4:30:50 PM	Tube furnace set to 0
5/20/2012	4:30:51 PM	Helium valve closed
5/20/2012	4:30:51 PM	BCl3 valve closed
5/20/2012	4:30:51 PM	PH3 valve closed
5/20/2012	4:30:51 PM	SiCl4 pre valve closed
5/20/2012	4:30:51 PM	SiCl4 post valve closed
5/20/2012	4:30:51 PM	Main Vac valve closed
5/20/2012	4:30:51 PM	Bypass valve closed
5/20/2012	4:30:51 PM	H2 valve opened
5/20/2012	4:30:51 PM	Bubbler valve opened
5/20/2012	4:30:51 PM	Helium MFC set to  0.000000
5/20/2012	4:30:51 PM	H2 MFC set to  500.000000
5/20/2012	4:30:51 PM	BCl3 MFC set to  0.000000
5/20/2012	4:30:51 PM	PH3 MFC set to  0.000000
5/20/2012	4:30:51 PM	SiCl4 MFC set to  0.000000
5/20/2012	4:30:51 PM	Bypass solenoid MFC set to  0.000000
5/20/2012	4:30:51 PM	Tube furnace set to 1000
5/20/2012	4:55:51 PM	Helium valve closed
5/20/2012	4:55:51 PM	BCl3 valve closed
5/20/2012	4:55:51 PM	PH3 valve closed
5/20/2012	4:55:51 PM	Main Vac valve closed
5/20/2012	4:55:51 PM	Bypass valve closed
5/20/2012	4:55:51 PM	H2 valve opened
5/20/2012	4:55:51 PM	SiCl4 pre valve opened
5/20/2012	4:55:51 PM	SiCl4 post valve opened
5/20/2012	4:55:52 PM	Bubbler valve opened
5/20/2012	4:55:52 PM	Helium MFC set to  0.000000
5/20/2012	4:55:52 PM	H2 MFC set to  500.000000
5/20/2012	4:55:52 PM	BCl3 MFC set to  0.000000
5/20/2012	4:55:52 PM	PH3 MFC set to  0.000000
5/20/2012	4:55:52 PM	SiCl4 MFC set to  50.000000
5/20/2012	4:55:52 PM	Bypass solenoid MFC set to  0.000000
5/20/2012	4:55:52 PM	Tube furnace set to 1000
5/20/2012	5:20:52 PM	Helium valve closed
5/20/2012	5:20:52 PM	BCl3 valve closed
5/20/2012	5:20:52 PM	PH3 valve closed
5/20/2012	5:20:52 PM	SiCl4 pre valve closed
5/20/2012	5:20:52 PM	SiCl4 post valve closed
5/20/2012	5:20:52 PM	Main Vac valve closed
5/20/2012	5:20:52 PM	Bypass valve closed
5/20/2012	5:20:52 PM	H2 valve opened
5/20/2012	5:20:52 PM	Bubbler valve opened
5/20/2012	5:20:52 PM	Helium MFC set to  0.000000
5/20/2012	5:20:52 PM	H2 MFC set to  500.000000
5/20/2012	5:20:52 PM	BCl3 MFC set to  0.000000
5/20/2012	5:20:52 PM	PH3 MFC set to  0.000000
5/20/2012	5:20:52 PM	SiCl4 MFC set to  0.000000
5/20/2012	5:20:52 PM	Bypass solenoid MFC set to  0.000000
5/20/2012	5:20:52 PM	Tube furnace set to 750
5/20/2012	5:35:52 PM	Helium valve closed
5/20/2012	5:35:52 PM	BCl3 valve closed
5/20/2012	5:35:52 PM	PH3 valve closed
5/20/2012	5:35:52 PM	SiCl4 pre valve closed
5/20/2012	5:35:52 PM	SiCl4 post valve closed
5/20/2012	5:35:52 PM	Main Vac valve closed
5/20/2012	5:35:52 PM	Bypass valve closed
5/20/2012	5:35:52 PM	H2 valve opened
5/20/2012	5:35:52 PM	Bubbler valve opened
5/20/2012	5:35:52 PM	Helium MFC set to  0.000000
5/20/2012	5:35:52 PM	H2 MFC set to  500.000000
5/20/2012	5:35:52 PM	BCl3 MFC set to  0.000000
5/20/2012	5:35:52 PM	PH3 MFC set to  0.000000
5/20/2012	5:35:52 PM	SiCl4 MFC set to  0.000000
5/20/2012	5:35:52 PM	Bypass solenoid MFC set to  0.000000
5/20/2012	5:35:52 PM	Tube furnace set to 0
5/20/2012	5:52:57 PM	H2 valve closed
5/20/2012	5:52:57 PM	BCl3 valve closed
5/20/2012	5:52:57 PM	PH3 valve closed
5/20/2012	5:52:57 PM	SiCl4 pre valve closed
5/20/2012	5:52:57 PM	SiCl4 post valve closed
5/20/2012	5:52:57 PM	Main Vac valve closed
5/20/2012	5:52:57 PM	Bypass valve closed
5/20/2012	5:52:57 PM	Helium valve opened
5/20/2012	5:52:57 PM	Bubbler valve opened
5/20/2012	5:52:57 PM	Helium MFC set to  500.000000
5/20/2012	5:52:57 PM	H2 MFC set to  0.000000
5/20/2012	5:52:57 PM	BCl3 MFC set to  0.000000
5/20/2012	5:52:57 PM	PH3 MFC set to  0.000000
5/20/2012	5:52:57 PM	SiCl4 MFC set to  0.000000
5/20/2012	5:52:57 PM	Bypass solenoid MFC set to  0.000000
5/20/2012	5:52:57 PM	Tube furnace set to 0
5/20/2012	5:57:52 PM	Run aborted at 5:57 PM
5/20/2012	5:57:52 PM	Helium valve closed
5/20/2012	5:57:52 PM	H2 valve closed
5/20/2012	5:57:52 PM	BCl3 valve closed
5/20/2012	5:57:52 PM	PH3 valve closed
5/20/2012	5:57:52 PM	SiCl4 pre valve closed
5/20/2012	5:57:52 PM	SiCl4 post valve closed
5/20/2012	5:57:52 PM	Bypass valve closed
5/20/2012	5:57:52 PM	Main Vac valve closed
5/20/2012	5:57:52 PM	Bubbler valve closed
5/20/2012	5:57:52 PM	Helium MFC set to  0.000000
5/20/2012	5:57:52 PM	H2 MFC set to  0.000000
5/20/2012	5:57:52 PM	BCl3 MFC set to  0.000000
5/20/2012	5:57:52 PM	PH3 MFC set to  0.000000
5/20/2012	5:57:52 PM	SiCl4 MFC set to  0.000000
5/20/2012	5:57:52 PM	Tube furnace set to 0
5/20/2012	5:58:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/20/2012	5:58:55 PM	Recipe started at 5:58 PM
5/20/2012	5:58:55 PM	Helium valve closed
5/20/2012	5:58:55 PM	H2 valve closed
5/20/2012	5:58:55 PM	BCl3 valve closed
5/20/2012	5:58:55 PM	PH3 valve closed
5/20/2012	5:58:55 PM	SiCl4 pre valve closed
5/20/2012	5:58:55 PM	SiCl4 post valve closed
5/20/2012	5:58:55 PM	Main Vac valve closed
5/20/2012	5:58:55 PM	Bubbler valve closed
5/20/2012	5:58:55 PM	Bypass valve opened
5/20/2012	5:58:55 PM	Helium MFC set to  0.000000
5/20/2012	5:58:55 PM	H2 MFC set to  0.000000
5/20/2012	5:58:55 PM	BCl3 MFC set to  0.000000
5/20/2012	5:58:55 PM	PH3 MFC set to  0.000000
5/20/2012	5:58:55 PM	SiCl4 MFC set to  0.000000
5/20/2012	5:58:55 PM	Bypass solenoid MFC set to  0.000000
5/20/2012	5:58:55 PM	Tube furnace set to 0
5/20/2012	5:59:58 PM	Helium valve closed
5/20/2012	5:59:58 PM	H2 valve closed
5/20/2012	5:59:58 PM	BCl3 valve closed
5/20/2012	5:59:58 PM	PH3 valve closed
5/20/2012	5:59:58 PM	SiCl4 pre valve closed
5/20/2012	5:59:58 PM	SiCl4 post valve closed
5/20/2012	5:59:58 PM	Main Vac valve closed
5/20/2012	5:59:58 PM	Bubbler valve closed
5/20/2012	5:59:58 PM	Bypass valve opened
5/20/2012	5:59:58 PM	Helium MFC set to  0.000000
5/20/2012	5:59:58 PM	H2 MFC set to  0.000000
5/20/2012	5:59:58 PM	BCl3 MFC set to  0.000000
5/20/2012	5:59:58 PM	PH3 MFC set to  0.000000
5/20/2012	5:59:58 PM	SiCl4 MFC set to  0.000000
5/20/2012	5:59:58 PM	Bypass solenoid MFC set to  0.000000
5/20/2012	5:59:58 PM	Tube furnace set to 0
5/20/2012	6:00:30 PM	Helium valve closed
5/20/2012	6:00:30 PM	H2 valve closed
5/20/2012	6:00:30 PM	BCl3 valve closed
5/20/2012	6:00:30 PM	PH3 valve closed
5/20/2012	6:00:30 PM	SiCl4 pre valve closed
5/20/2012	6:00:30 PM	SiCl4 post valve closed
5/20/2012	6:00:30 PM	Bypass valve closed
5/20/2012	6:00:30 PM	Bubbler valve closed
5/20/2012	6:00:30 PM	Main Vac valve opened
5/20/2012	6:00:30 PM	Helium MFC set to  0.000000
5/20/2012	6:00:30 PM	H2 MFC set to  0.000000
5/20/2012	6:00:30 PM	BCl3 MFC set to  0.000000
5/20/2012	6:00:30 PM	PH3 MFC set to  0.000000
5/20/2012	6:00:30 PM	SiCl4 MFC set to  0.000000
5/20/2012	6:00:30 PM	Bypass solenoid MFC set to  0.000000
5/20/2012	6:00:30 PM	Tube furnace set to 0
5/20/2012	6:00:31 PM	Run finished at 6:00 PM
5/20/2012	6:00:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
